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Critical Dimension re-entrant tip

Critical Dimension re-entrant tip

These tips are widely used in Veeco’s X-3D and Insight - Systems.

 

Typical application of CDR - Tips are measurements of:

 

  • line width,
  • trench width,
  • side wall roughness,
  • slope angle,
  • trench depth, and
  • step height

 

 

Tip Apex Specifications

Type Tip width
[nm]
Overhang
[nm]
Effective length
[nm]
CDR 850 650 - 850 100 - 150 5000 - 7500
CDR 300 200 - 300 13 - 25 1000 - 1500
CDR 130 S 110 - 140 13 - 25 250 - 350
CDR 120 100 - 130 5 - 15 500 - 700
CDR 70 57 - 70 5 - 11 450 - 550
CDR 70 S 57 - 70 5 - 11 350 - 450
CDR 50 40 - 50 5 - 8 250 - 350
CDR 50 S 40 - 50 5 - 8 190 - 260
CDR 32 27 - 32 3 - 5 180 - 220
CDR 32 S 27 - 32 3 - 5 130 - 180

The "C" in the ordering code denotes carbon coating for improved wear characteristics.

 

Please let us know if you have special needs for tip width, overhang, or effective length.

 

Each probe is individually quality inspected by imaging in a SEM. A certificate with measurement values and images will be provided (a sample can be found in the document section).

 

CDR probes are shipped in packs of 5 tips.

CDR


Pack: