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Cylindrical Metrology Probes

Cylindrical Metrology Probes

These tips are widely used in Veeco’s X-3D and Insight - Systems.

 

Typical application of CDP - Tips are depth measurements. The CDP200A is widely used for scanner orthogonality calibration

To compensate for tip mount tilt the cylindrical probe tips can also be fabricated in a tilted version. Typical off the shelf tilt angels are 3° and 12°.

 

Tip Apex Specifications

Type Tip width [nm] Effective length [nm]
CDP 200 A 130 - 270 500 - 700
CDP 55 L 40 - 55 800 - 1000
CD 55 A 40 - 55 500 - 700
CDP 35 25 - 35 *)
CDP 25 15 - 25 *)
CDP 15 < 15 > 150 *)

*) Please note required length in your quotation request.
 

The CDP probes are also available with carbon coating for improved wear characteristics.
 

Please inquire for tilt compensated CDP probes.
 

Please let us know if you have special needs for tip width or effective length.
 

Each probe is individually quality inspected by imaging in a SEM.
A certificate with measurement values and images will be provided (a sample can be found in the document section).

 

CDP probes are shipped in packs of 5 tips.

CDP


Pack: