Cylindrical Metrology Probes
Probe tip, cantilever, and holder chip consist of single crystal silicon.
Each chip is uniquely numbered.
All cantilevers are shipped with Al-reflex coating.
Each probe is individually quality inspected by imaging in a SEM.
A certificate with measurement values and images will be provided (a sample can be found in the document section).
General Specifications
| Cantilever dimensions |
length = 125 (± 15) µm
width = 35 (± 3) µm |
| Typical stiffness: |
40 N/m |
| Resonant frequency: |
300 (± 95) kHz |
| Holder chip dimensions |
length = 3.40 mm
width = 1.55 mm
thickness = 0.32 mm |
