CFM - Conical Force Modulation mode
Common Properties
| Material |
single crystal silicon, n-type, highly doped |
| Cantilevers per chip |
one |
| Cantilever shape |
Rectangular |
| Tip offset |
~ 10 µm |
| Tip Aspect Ratio |
1.5:1 |
| Chip Dimensions |
3.4 mm x 1.6 mm x 315 µm |
| Alignment Grooves |
Yes |
Typical Cantilever Specification
| Spring Constant |
3 N/m |
Range: 1 - 7 |
| Resonant Frequency |
75 kHz |
Range: 45 - 90 |
| Length |
225 µm |
Range: 215 - 235 |
| Width |
42 µm |
Range: 40 - 45 |
| Thickness |
3 µm |
Range: 2 - 4 |
Team Nanotec guarantees 80 % of it's Aspire-Probes meet the specifications.
