IVPS100A - Improved Vertical Parallel Structure
Tip width characterizer with an array of 5 lines 100 nm wide and a single line 100 nm wide for larger tips.
Sidewalls are vertical and parallel (111-crystal planes).
|Width of line
actual linewidth is delivered for each chip
||500 nm ± 10nm
|Depth of line
||~ 1 µm
||< 90° ± 0,5°
|Top corner radius
||< 10 nm
Also well suited as SEM standard