Metrology Probes Team Nanotec metrology probes for use in 3D-AFM systems comprise round probes for measureing line or trench width and shape as well as cylindrical probes for depth measurements. Flared CD probes are used for determing sidewall roughness. Critical Dimension re-entrant tip These tips are widely used in Bruker’s X-3D and Insight - Systems. Product Information Cylindrical Metrology Probes Cylindrical Metrology Probes are well suited for depth measurements. For optimal measurement results select the largest diameter and the shortest length that fit your application. Product Information
