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High resolution electrostatic force microscopy

High resolution electrostatic force microscopy

Probe tips, cantilevers, and cantilever chips consist of single crystal silicon.

 

All cantilevers are shipped with Al-reflex coating (R).
The HR-EFM probes are also available with alignment grooves on the back side of the holder chip.
Shipments without reflex coating or with special coatings upon request.

 

All probe tips are SEM quality inspected prior to shipment.

 

Cantilever Dimensions:

Stiffness Typical resonant frequency Length Width
40 N/m 300 kHz 125 (± 15) µm 35 (± 3) µm
3.0 N/m 75 kHz 225 (± 15) µm 35 (± 3) µm
0.7 N/m 45 kHz 225 (± 15) µm 35 (± 3) µm

 

Holder chip dimensions:

Length 3.40 mm
Width 1.55 mm
Thickness 0.315 mm

HR-EFM


Pack: