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Metrology Probes

Team Nanotec metrology probes for use in 3D-AFM systems comprise round probes for measureing line or trench width and shape as well as cylindrical probes for depth measurements. Flared CD probes are used for determing sidewall roughness.

Critical Dimension re-entrant tip

These tips are widely used in Bruker’s X-3D and Insight - Systems.

Cylindrical Metrology Probes

Cylindrical Metrology Probes are well suited for depth measurements. For optimal measurement results select the largest diameter and the shortest length that fit your application.

Critical Dimension Flared re-entrant tip

The CDF130 is specially designed for roughness measurements on sidewalls in 3D-AFMs.