Team Nanotec metrology probes for use in 3D-AFM systems comprise round probes for measureing line or trench width and shape as well as cylindrical probes for depth measurements. Flared CD probes are used for determing sidewall roughness.
These tips are widely used in Bruker’s X-3D and Insight - Systems.
Cylindrical Metrology Probes are well suited for depth measurements.
For optimal measurement results select the largest diameter and the shortest length that fit your application.
The CDF130 is specially designed for roughness measurements on sidewalls in 3D-AFMs.