IVPS100 - Improved Vertical Parallel Structure
Tip width characterizer with an array of 5 lines with vertical, paralell sidewalls (111-crystal planes).
Specifications
| Material |
Silicon |
| Width of line |
100 nm
actual linewidth is delivered for each chip |
| Pitch |
500 nm ± 10nm |
| Depth of line |
~ 1 µm |
| Surface/sidewall angle |
< 90° ± 0,5° |
| Sidewall parallelity |
< 1° |
| Top corner radius |
< 10 nm |
Also well suited as SEM standard
