I2FSR - Improved Flared Silicon Ridge
Line with sharp, overhanging edges.
Specifications
| Material |
Silicon coated with Siliconnitride |
| Width of line |
~ 2 µm |
| Depth of line |
> 4 µm |
| Overhang |
> 250 nm |
| Overhang slope angle |
~ 35° |
| Top corner radius |
< 10 nm |
| Edge roughness |
< 10 nm |
